Microsystem Design

Book Description

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS).
The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.
The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.
This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.
Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

Customer Reviews:

Review on microsystem design.......2003-11-25

The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.

Heat Convection in Micro Ducts (Microsystems)

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Heat Convection in Micro Ducts (Microsystems)
Yitshak Zohar
Manufacturer: Springer
ProductGroup: Book
Binding: Hardcover

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ASIN: 1402072562

Book Description

As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips.
Heat Convection in Micro Ducts focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops.
This book will be of interest to the professional engineer and graduate student interested in learning about heat removal and temperature control in advanced integrated circuits and microelectromechanical systems.

Fundamentals And Applications of Microfluidics, Second Edition (Integrated Microsystems)

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Great Reference

Fundamentals And Applications of Microfluidics, Second Edition (Integrated Microsystems)
Nam-Trung Nguyen , and Steven T. Wereley
Manufacturer: Artech House Publishers
ProductGroup: Book
Binding: Hardcover

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ASIN: 1580539726

Book Description

Updating the Artech House bestseller, Fundamentals and Applications of Microfluidics, this newly revised second edition provides electrical and mechanical engineers with complete and current coverage of microfluidics - an emerging field involving fluid flow and devices in microscale and nanoscale. The second edition offers a greatly expanded treatment of nanotechnology, electrokinetics and flow theory.

The book shows engineers how to take advantage of the performance benefits of microfluidics and serves as an instant reference for state-of-the-art microfluidics technology and applications. The wide range of applications discussed includes fluid control devices, gas and fluid measurement devices, medical testing equipment, and implantable drug pumps. This cutting-edge resource offers practical guidance in choosing the best fabrication and enabling technology for a specific microfluidic application, and explains how to design a microfluidic device. Moreover, professionals get simple calculations, ready-to-use data tables, and rules of thumb that help them make design decisions and determine device characteristics quickly.

Customer Reviews:

Great Reference.......2007-06-08

This is the best all around text I have found on microfluidics. It has a lot of comprehensive informaion on fabrication techniques while still providing all of the necessary theoretical background. It also has a lot of good examples and discussions of many of the common applications of the field. If you get one book on microfluidics, it should be this one.

Average customer rating:

A case of false advertisement
This book is garbage
All About Microsystems Packaging

Fundamentals of Microsystems Packaging
Rao Tummala
Manufacturer: McGraw-Hill Professional
ProductGroup: Book
Binding: Hardcover

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ASIN: 0071371699

Book Description

LEARN ABOUT MICROSYSTEMS PACKAGING FROM THE GROUND UP

Written by Rao Tummala, the field’s leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology. This rigorous and thorough introduction to electronic packaging technologies gives you a solid grounding in microelectronics, photonics, RF, packaging design, assembly, reliability, testing, and manufacturing and its relevance to both semiconductors and systems. You’ll find:

*Full coverage of electrical, mechanical, chemical, and materials aspects of each technology
*Easy-to-read schematics and block diagrams
*Fundamental approaches to all system issues
*Examples of all common configurations and technologies—wafer level packaging, single chip, multichip, RF, opto-electronic, microvia boards, thermal and others
*Details on chip-to-board connections, sealing and encapsulation, and manufacturing processes
*Basics of electrical and reliability testing

Download Description

Written by Rao Tummala, the field's leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology.

Customer Reviews:

A case of false advertisement.......2004-12-02

The purchase of this book was supposed to help me gain understanding of packaging technique, processes etc. There is very little focus on these issues in this text. The bulk of the text is concerned with basic circuit related stuff such as the basic equations for resistors, capacitors transistors and so on. I would have thought that the focus would be on packaging ..

I regret purchasing this book, I consider it a 'cover-to-cover disappointment'. If you are looking for texts on packaging and you want detail, you will be better off searching for books on IC and MEMS design, since these usually address packaging it being an important design consideration.

That said, I choose to give this book two stars (rather than one) since it may serve as a (very) general reference on a variety of circuit theory and may thus be useful for first year students in electrical engineering.

This book is garbage.......2003-10-27

Nothing personal, for those who give more than 2 stars for this book, you are either a friend of the author, got the book for free, or never really review it throroughly. Here are the reason why:
1. Nothing is new in this book that you can get it off the web
2. Equations were given without fully specify its component
3. You can't work the problem in the back of the chapter because there are no materials in the chapter to support it. You need your old engineering book in order to solve these problems
4. Problems were stated unclear and incorrect. For example, he ask to calculate an N-channel MOSFET transistor problem, but the figure he used is a P-channel. It seems like the author either pull these problems out of this behind or took these problems from other engineering books and change some values to make it different, but unfortunately, those values were unworkable.
5. Pretty thick book for a lot of garbage. If I need to work electrical or heat transfer problems, I'll go to my old engineering book at least those authors know their materials.

All About Microsystems Packaging.......2001-12-31

"Fundamentals of Microsystems Packaging" is an informative, well-written textbook, the first to cover this rapidly-evolving technology. Professor Tummala's latest book should appeal to only three groups: those who know a lot about microsystems packaging, those who know something about it, and those who know nothing about it.

Microsystems packaging specialists, who typically focus on one sub-specialty, will find this detailed exposition of the entire field broadening. Non-specialists with some general packaging knowledge will find here all that they need to fully understand and work with the key elements of microsystems packaging. Novices, students, and those in related technical fields will find a well-structured introduction that prepares them to deal with microsystems packaging.

This comprehensive textbook offers to all of the above groups a firm grounding in the diverse disciplines comprising microsystems packaging. Nineteen of the chapters share the title, "Fundamentals of ...". "Fundamental" means "a foundation," and that is what these chapters provide, covering the key elements of topics ranging from semiconductors to systems, including design, processing, materials, manufacture, testing, performance, reliability, thermal management, and environmental considerations.

For the specialist, who must build upon these foundations, each chapter includes a judicious selection of recommended further readings. For the autodidact, the scholar, or the flagellant, there are even homework problems to test your knowledge. Four chapters, covering optoelectronics, MEMS, RF packaging, and wafer-level packaging, lead the venturesome to the borders of today's knowledge, where they might glimpse the promised land, or just gape at the dark forests of ignorance.

Although the text is the child of fifty authors, the logical flow and smooth editing make it a unified work that speaks with one clear voice. Despite their diversity, the 2:1 ratio of academic to practitioner authors makes a good balance of technical rigor and practical experience. Talented illustrators provided a wealth of informative two-color pictures, charts, pictures, and diagrams.

Book Description

Microsystems and MEMS technology represents one of the biggest breakthroughs in the area of mechanical and electronic technology to occur in recent years. This is the technology of extremely small and powerful devices – and systems built around such devices – which have mechanical and electrical components. MEMS technology is beginning to explode, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarize future engineers with this broad-ranging technology. Hsu's MEMS & MICROSYSTEMS text provides an engineering design approach to MEMS and microsystems, appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases, and applied problems. The book is appropriate for Mechanical and Aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical Engineering students will be provided strong coverage of the mechanical side of MEMS, something they may not receive from other courses in their curriculum.

Customer Reviews:

MEMS and Microsystems: Design and Manufacture.......2004-08-10

This book covers MEMS design in various aspects, such as the philosophy of miniaturization, fundamentals of micro fabrication, philosophy of MEMS design and procedures, MEMS design with the help of analysis, etc. This book is well written. It is especially good for those students without much electrical engineering background.

Why isn't zero stars an option?.......2002-11-06

Clearly, this book slipped through the cracks in the scientific editor's desk, as it contains copious errors in not only math, but concepts also. The end of the chapter problems are ill-posed, as they often refer to 2-3 figures/examples within the chapter that require the student to make baseless assumptions in order to solve the problem.
Also, the low print quality and ever poorer figure quality make me wonder where my money went. Perhaps after a couple of revisions, a tight edit, and quality review this book will be worthy to be called a text.

Next time, edit the book before publishing!.......2002-10-31

This book is here to really annoy students and teachers alike. The problems are vague and useless, the examples contain numerous math errors, and the author uses non-conventional notation and random greek letters. Typical problems refer the reader to figures and examples around the book, which combined are still missing half of the problem. The result? Spending half an hour to solve a single-equation problem, "guessing" half the values anyway. Some of the diagrams in the book were obviously scanned at a terrible resolution, rendering them unreadable (is it so hard to find a "legible" periodic table?)...

Optical Inspection of Microsystems (Optical Science and Engineering Series)

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Optical Inspection of Microsystems (Optical Science and Engineering Series)

Manufacturer: CRC
ProductGroup: Book
Binding: Hardcover

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ASIN: 0849336821

Book Description

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Laser Diode Microsystems (Microtechnology and MEMS)

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Laser Diode Microsystems (Microtechnology and MEMS)
Hans Zappe
Manufacturer: Springer
ProductGroup: Book
Binding: Hardcover

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ASIN: 3540404546

Book Description

Laser Diode Microsystems provides the reader with the basic knowledge and understanding required for using semiconductor laser diodes in optical microsystems and micro-optical electromechanic systems. This tutorial addresses the fundamentals of semiconductor laser operation and design, coupled with an overview of the types of laser diodes suitable for use in Microsystems, along with their distinguishing characteristics. Emphasis is placed on laser diode characterization and measurement as well as the assembly techniques and optical accessories required for incorporation of semiconductor lasers into complex microsystems. Equipped with typical results and calculation examples, this hand-on text helps readers to develop a feel for how to choose a laser diode, characterize it and incorporate it into a microsystem.

Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)

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Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)
Jan A. Dziuban
Manufacturer: Springer
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Binding: Hardcover

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Wafer Bonding

ASIN: 1402045786

Book Description

Bonding in Microsystem Technology concerns the exciting field of microsystems (known under varying names as: MEMS, µTAS (analytical or chemical Microsystems), MOEMS: the micro-miniature devices, utilizing extremely miniaturized mechanical structures made usually from silicon by wet deep anisotropic etching. Such structures cannot be used directly, they must be designed and fabricated as a part of the three – dimensional multi-layer sandwich built from silicon or silicon and glass. The procedures of formation of such a sandwich are known as bonding. The book contains the description of wet anisotropic micromachining of basic silicon micromechanical constructions and their utilization in microsystems followed by the detailed discussion of all of methods of bonding used for the formation of silicon and silicon-glass microsystems, with the special attention paid to the anodic bonding technique.

Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. Following this, presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process flow-charts and applications of basic micromechanical structures in microsystems are shown. Next, high-temperature, low temperature and room-temperature bonding and their applications in microsystem technology are presented. The following part of the book contains the detailed description of anodic bonding, starting from analysis of properties of glasses suitable for anodic bonding, and discussion of the nature of the process. Next all types of anodic bonding and sealing procedures used in microsystem technology are presented. This part of the book finishes with examples of applications of anodic bonding in microsystem technology taken from the literature but mainly based on the author’s personal experience.

Bonding in Microsystem Technology is addressed to scientists and researchers, as well as to academic teachers and students, engineers active in the field of electric/electronics and microelectronics. It can serve as the encyclopaedia of wet etching and bonding for microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students. The book contains a large number of illustrations, algorithmic flow-charts and microsystems description and a rich index of literature sources.

Multithreaded Programming with Java Technology

Average customer rating:

Fascinating, flawed but essential
Great under-the-hood book for experienced developers
Little to do with Java besides the title
it cover de ground mon, and a lot more too.
Disorganized Mess

Multithreaded Programming with Java Technology
Bil Lewis , Daniel J. Berg , and Sun Microsystems Press
Manufacturer: Prentice Hall PTR
ProductGroup: Book
Binding: Paperback

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ASIN: 0130170070

Customer Reviews:

Fascinating, flawed but essential.......2005-01-25

This is the only book I have seen that thoroughly covers how threads are implemented in a modern OS and how this affects how code runs. It's certainly the most useful book on threading I have. It's a good book to buy after you've written some concurrent code and have some problems.

It's not a Java book - it's a platform focused
multithreading book. It could do with some restructuring to make it more accessible.

Great under-the-hood book for experienced developers.......2002-03-17

This was the first threading book I read--which turned out to be a huge mistake. The material is very dense and only a small part of it is Java. Most of the book deals with operating system threading concepts. There is a lot of space dedicated to contrasting MS vs. Unix threading models. Also, comparisons between Java and c threading.

If you are looking for a solid beginner book on Java threading (or threading in general), I highly recommend Concurrency: State Models & Java Programs. This is the second threading book I read and I highly recommend it if your goal is to _understand_ thread theory and problems. It approaches the subject in a very rigorous manner and models all concepts using finite state machines and then showing the Java source code.

If you are already comfortable with basic threading concepts and some systems programming then I would recommend the Multithreaded Programming with Java Technology.

I deducted a star because of a few annoying typos and for a few convoluted sections.

Little to do with Java besides the title.......2002-02-23

That this book was a member of the Sun Java series was the primary reason make me take a look at this book.

I have been highly disappointed. This body of work for this book is primarly a rushed port of the authors other title - named, funnily enough Multithreaded Programming with PThreads.

The Java topics seem to be bolted on as an after-thought - and makes the book read and present very badly. For example a good amount of examples are presented in C not Java, demonstrating POSIX threading!

The author is also in the bad habit of presenting material out-of-order, so that the reader has to wait sometimes 50 pages for clarification. This does not breed suspense, merely frustation at the disorder.

The low-level OS technical coverage is quite adequate - with a good explanation of LWP and POSIX threading (if only this is what I bought the book for!).

The author is clearly a C type who has come to Java and tries to basically recreate the semantics of C POSIX threading in Java... while at the same time constantly drifting back to a topic that he is clearly more comfortable with - PThreads.

This is hardly an embracing approach for a book with the word Java in the title - an obvious cash-in on the behalf of the publisher, Prentice Hall.

Do not buy this book.

it cover de ground mon, and a lot more too........2002-01-06

Any book on multithreading this well written and illustrated and going from test-and-set to volatile- well mon, you gots to
understand what you getting- the very best. Mucho kudos to the
writers and their collaborators- power players if there ever were power players. I give it a ten.

Disorganized Mess.......2001-07-20

I purchased this book hoping to develop a deeper understanding of multi-threading, the proverbial under-the-hood down and roll-your-sleeves-up nitty gritty. Frankly this book left me quite disappointed. It's poorly organized and poorly editted. While I am sure it has some valuable content, the low readability level and very poor organization (it really gives the impression that it was sort of patched together) prevented me from ever getting into it. In my humble opinion, the book

Book Description

This book introduces the theory and practice of microfluidic technology. The content is designed to be of value to engineers with different backgrounds working in the area of microsystem technology. The book includes the necessary fabrication technologies and examples of the latest microfluidic devices and systems that have been realized by a worldwide community of researchers.

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