Principles of Plasma Discharges and Materials Processing , 2nd Edition

Book Description

A Thorough Update of the Industry Classic on Principles of Plasma Processing

The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters.

New and expanded topics include:
* Updated cross sections
* Diffusion and diffusion solutions
* Generalized Bohm criteria
* Expanded treatment of dc sheaths
* Langmuir probes in time-varying fields
* Electronegative discharges
* Pulsed power discharges
* Dual frequency discharges
* High-density rf sheaths and ion energy distributions
* Hysteresis and instabilities
* Helicon discharges
* Hollow cathode discharges
* Ionized physical vapor deposition
* Differential substrate charging

With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

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A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Customer Reviews:

outstanding plasma resource.......2007-01-16

One of the most practical and comprehensive resources on plasma phyics and engineering. The book is much easier to understand and more in depth than most other books on the subject, except for maybe chen (who takes more of a physics approach, whereas lieberman takes more of an engineering approach) This book is a must have for anyone working with or studying plasmas.

Overrated.......2000-05-05

As a praciticing process engineer my opinion is this book lacks insight. Typical text book written a professor in the academic community with no practical experience. This book spends far to much time deriving equations and not discussing the basics concepts. The author makes a half hearted attempt to relate the first 14 chapters to the real worl, in a short and inadequate Chapter 15. This is the first mail book order book i took the time to return. In all honesty this book is not worth the $90.00. Spend your money elsewhere

The book provides an excellent overview of plasma processing.......1998-12-10

This book provides an excellent introduction and overview of plasma discharges applied to semiconductor manufacturing. It is well-organized, clearly-written and full of useful examples and exercises. And unlike many books on plasma physics, it is not overly-mathematical and contains many useful physical insights. I strongly recommend this book for anyone wanting to review the field of plasma processing.

An excellent overview of common plasma processing devices.......1998-12-10

Lieberman covers many of the standard processing devices and much of the physics needed to model them effectively.

The presentation is clear and extremely useful both as a reference and as a tutorial. A must-have book for anyone interested in plasma processing.

Very Good Theoretical Coverage of Plasma's, including ECR.......1998-05-02

This book provides a theoretical overview of plasma's, including coverage of ECR applications. This was very valuable for Hitachi Etchers. The theory is presented at an undergraduate level and assumes the reader has knowledge of vector analysis. Highly recommended for any Etch Process Engineer in the Semiconductor Industry.

Scanning Tunneling Microscopy I: General Principles and Applications to Clean and Absorbate-Covered Surfaces (Springer Series in Surface Sciences)

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Scanning Tunneling Microscopy I: General Principles and Applications to Clean and Absorbate-Covered Surfaces (Springer Series in Surface Sciences)

Manufacturer: Springer
ProductGroup: Book
Binding: Paperback

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Book Description

This second edition of Scanning Tunneling Microscopy I, updated with a guide to recent literature, is a unique introduction into a novel and fascinating technique that produces beautiful images of nature on an atomic scale, offering a comprehensive treatment of scanning tunneling microscopy, its diverse applications and its theoretical treatment.
The present volume describes in detail the technique itself, its applications to metals, semiconductors, layered materials, adsorbed molecules and superconductors. In addition to the many representative results reviewed, extensive references to original works will help to make accessible the vast body of knowledge already accumulated in this field.

X-Ray Absorption: Principles, Applications, Techniques of EXAFS, SEXAFS and XANES (Chemical Analysis: A Series of Monographs on Analytical Chemistry and Its Applications)

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X-Ray Absorption: Principles, Applications, Techniques of EXAFS, SEXAFS and XANES (Chemical Analysis: A Series of Monographs on Analytical Chemistry and Its Applications)

Manufacturer: Wiley-Interscience
ProductGroup: Book
Binding: Hardcover

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ASIN: 0471875473

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Describes several specific spectrometric techniques that are very useful in elucidating the fundamental nature of matter: EXAFS--Extended X-Ray Absorption of Fine Structure; SEXAFS--which is EXAFS applied to Surface Phenomena; and XANES--X-Ray Absorption Near Edge Structures. Articles explain the phenomena and describe examples of X-ray absorption applications in several fields, including chemistry, biochemistry, catalysis, amorphous and liquid systems, synchrotron radiation, and surface phenomena. Contributors explain the underlying theory, how to set up X-ray absorption experiments, and how to analyze the details of the resulting spectra. This volume will be of particular interest to physicists, chemists, biologists, and materials scientists.

Principles and Applications of Ion Scattering Spectrometry: Surface and Chemical and Structural Analysis

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Principles and Applications of Ion Scattering Spectrometry: Surface and Chemical and Structural Analysis
J. Wayne Rabalais
Manufacturer: Wiley-Interscience
ProductGroup: Book
Binding: Hardcover

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ASIN: 0471202770

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Ion scattering spectrometry, a powerful analytical tool used to determine the structure and composition of a substance, addresses critical problems in semiconductors, thin film growth, coatings, computer chips, magnetic storage devices, bioreactive surfaces, catalytic surfaces, and electrochemical surfaces (including the large battery industry). Principles and Applications of Ion Scattering Spectrometry: Surface Chemical and Structural Analysis represents the first and only book on this exciting field, seamlessly merging theoretical fundamentals with cutting-edge practical applications.

Author J. Wayne Rabalais, the world’s leading expert in ion scattering spectrometry, recognizes both the pedagogic and research needs of such a text and divides his work accordingly. Chapters 1 through 5 address senior undergraduates and beginning graduate students in chemical physics and include figures and illustrative diagrams intended to exemplify the discussions. Chapters 6 through 9 comprise material on the brink of current research and contain specific references to other sources at the end of each; further, chapter 10 is a bibliography of ion scattering publications. Topics covered include:

-Introductory, theoretical, and experimental aspects of ion scattering
-General features and structural analysis
-The recent technique of scattering and recoiling imaging spectrometry
-Examples of structural analysis
-Ion-surface charge exchange phenomena
-Hyperthermal ion-surface interactions

Book Description

The corresponding-states principle helps the understanding and calculating of thermodynamic, transport, and surface properties of substances in various states, required by our modern lifestyle. The Corresponding-States Principle and its Practice: Thermodynamic, Transport and Surface Properties of Fluids describes the origins and applications of the principle from a universal point of view with comparisons to experimental data where possible. It uses the universal theory to explain present theories. Emphasis is on the properties of pure systems, and the corresponding-states theory can also be extended to mixtures, which are treated as pure systems. Furthermore, the author discusses current progress, and shows technicians how to derive practical equations from molecular modeling. The Corresponding-States Principle and its Practice: Thermodynamic, Transport and Surface Properties of Fluids is the ideal handbook for those in chemical science and engineering related to energy, environment, natural gas, and petroleum.

* Describes the origins and applications from a universal viewpoint
* Includes experimental data for comparisons
* Suitable for researchers, applied engineers, and those interested in the corresponding states theory

Experimental Methods in the Physical Sciences, Volume 37: Characterization of Amorphous and Crystalline Rough Surface--Principles and Applications (Experimental Methods in the Physical Sciences)

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Experimental Methods in the Physical Sciences, Volume 37: Characterization of Amorphous and Crystalline Rough Surface--Principles and Applications (Experimental Methods in the Physical Sciences)

Manufacturer: Academic Press
ProductGroup: Book
Binding: Hardcover

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ASIN: 012475984X

Book Description

The structure of a growth or an etch front on a surface is not only a subject of great interest from the practical point of view but also is of fundamental scientific interest. Very often surfaces are created under non-equilibrium conditions such that the morphology is not always smooth.

In addition to a detailed description of the characteristics of random rough surfaces, Experimental Methods in the Physical Sciences, Volume 37, Characterization of Amorphous and Crystalline Rough Surface-Principles and Applications will focus on the basic principles of real and diffraction techniques for quantitative characterization of the rough surfaces. The book thus includes the latest development on the characterization and measurements of a wide variety of rough surfaces. The complementary nature of the real space and diffraction techniques is fully displayed.

Key Features
* An accessible description of quantitative characterization of random rough surfaces and growth/etch fronts
* A detailed description of the principles, experimentation, and limitations of advanced real-space imaging techniques (such as atomic force microscopy) and diffraction techniques (such as light scattering, X-ray diffraction, and electron diffraction)
* Characterization of a variety of rough surfaces (e.g., self-affine, mounded, anisotropic, and two-level surfaces) accompanied by quantitative examples to illustrate the essence of the principles
* An insightful description of how rough surfaces are formed
* Presentation of the most recent examples of the applications of rough surfaces in various areas

Principles of Surface Physics (Advanced Texts in Physics)

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Principles of Surface Physics (Advanced Texts in Physics)
Friedhelm Bechstedt
Manufacturer: Springer
ProductGroup: Book
Binding: Hardcover

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ASIN: 3540006354

Book Description

This comprehensive and innovative text provides an understanding of the geometric and electronic structure of surfaces. It addresses the surfaces of covalent and ionic solids and also metals. The book emphasizes fundamental aspects, such as the principles of surface crystallography and thermodynamics, the forces driving the rearrangement of the atoms, and the relationship between bonding and electronic structure. The book illuminates the relationship between surface orientation, chemistry, energetics, and the resulting properties. The text includes a discussion of elementary excitations at surfaces, their description and measurement. The general physical arguments and methods presented in the book will also allow the reader to analyse novel surfaces and interfaces of new materials. This makes the book an indispensable reference to all those studying growth, surface-molecule interactions, self-assembled structures, property engineering and materials development.

Sliding Friction: Physical Principles and Applications (NanoScience and Technology)

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Personal opinion: "Sliding Friction" by B.N.J. Persson
Excellent overview with emphasis on the physical principles
Understanding friction

Sliding Friction: Physical Principles and Applications (NanoScience and Technology)
Bo N.J. Persson
Manufacturer: Springer
ProductGroup: Book
Binding: Hardcover

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ASIN: 3540671927

Book Description

Sliding friction is one of the oldest problems in physics and certainly one of the most important from a practical point of view. The ability to produce durable low-friction surfaces and lubricant fluids has become an important factor in the miniaturization of moving components in many technological devices, e.g. magnetic storage, recording systems, miniature motors and many aerospace components. This book will be useful to physicists, chemists, materials scientists, and engineers who want to understand sliding friction. The book (or parts of it) could also form the basis for a modern undergraduate or graduate course on tribology. This second edition covers several new topics including friction on superconductors, experimental studies and computer simulations of the layering transition, nanoindentation, wear in combustion engines, rubber wear, effects due to humidity, rolling and sliding of carbon nanotubes and the friction dynamics of granular materials.

Customer Reviews:

Personal opinion: "Sliding Friction" by B.N.J. Persson.......2001-07-01

The book by B.N.J. Persson has a unique position in the field of tribology. It manages to bridge naturally many length scales phenomena into a single comprehensive frame work, from macroscopic mechanics of friction and wear down to atomic level. The book gives an excellent overview of current state of scientific knowledge, and it is very useful both for beginners in the field and experts. As a Ph.D student, the book helped me to get familiar and interested in the field, and it is still a major reference for many of the things I do.

Excellent overview with emphasis on the physical principles.......2000-10-06

Many different mechanisms can give rise to energy dissipation is sliding friction, depending on whether you are dealing with dry friction, boundary lubrication, hydrodynamic lubrication, or maybe electronic friction. In Bo Persson's book the physical models that capture the essential mechanisms of each regime are clearly described. At the same time, the reader learns about many recent (as well as classical) experiments in the field, including a broad list of references . I recommend the book to both graduate students and anybody who is working in the field or interested in the physical mechanisms of sliding friction.

Understanding friction.......2000-09-25

This book is an excellent introduction to the physics of sliding friction. It puts an emphasis on the microscopic mechanisms underlying the phenomenon of friction. Everything is explained in a very clear way. Mathematics is kept to a minimum and only used to clarify things. The book also covers, in contrast to traditional books on tribology, topics like the friction on superconductors. I can recommend this book to both experienced scientists and graduate students who are interested in the physics of friction. I am sure you will enjoy reading it. Have fun!

Surface Characterization Methods: Principles, Techniques, and Applications (Surfectant Science Series, V. 87)

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Surface Characterization Methods: Principles, Techniques, and Applications (Surfectant Science Series, V. 87)

Manufacturer: CRC
ProductGroup: Book
Binding: Hardcover

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ASIN: 0824773365

Book Description

"Outlines the scientific basis and experimental methods for a broad sample of surface analysis techniques, drawing heavily from established principles of physical and analytical chemistry. Sketches a simple low-cost method of tracking particles in three dimensions."

Surface Science: Principles and Applications : Proceedings of the Australian-German Workshop, Sydney, Australia, December 2-5, 1991 (Springer Proceedings in Physics)

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Surface Science: Principles and Applications : Proceedings of the Australian-German Workshop, Sydney, Australia, December 2-5, 1991 (Springer Proceedings in Physics)
R. F. Howe , and R. N. Lamb
Manufacturer: Springer
ProductGroup: Book
Binding: Hardcover

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